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Lecture Inkyu Park


05 October 2010 FWN-Building 5113.0201, Nijenborgh 4, 9747 AG, Groningen
Speaker: Prof. Dr. Inkyu Park
Affiliation: Department of Mechanical Engineering & KI for the NanoCentury
Korea Advanced Institute of Science and Technology (KAIST)
Title: Top-down, Bottom-up, and Hybrid Nanofabrication for Multifunctional Nanowire Electronics Applications
Date: Tue Oct 5, 2010
Start: 16.00
Location: FWN-Building 5113.0201
Host: G. Palasantzas
Telephone: +31 50 363 4974


One dimensional nanostructures including nanowires and nanotubes are drawing a great attention due to their unique physical and chemical properties, and usefulness in sensor, display, electronics, and energy applications. However, simple, reliable, and controlled integration and assembly of one dimensional nanostructures on functional electronic devices have been very challenging – causing a barrier against their widespread industrial applications. In this talk, two approaches to reliable and controlled fabrication and integration of nanowire-based multifunctional nanoelectronic devices are discussed. First, top-down nanofabrication based on nanolithography and plasma etching processes for the fabrication and integration of silicon nanowire array device is explained. Then, their applications in the bio/chemical sensing, and nanoscale chemical manipulation are discussed. Second, controlled synthesis and integration of nanowires based on focused energy field method are introduced. This method enables eco-friendly and inexpensive route to the fabrication of high performance nanoelectronic environmental sensing devices.

Last modified:22 October 2012 2.31 p.m.