MEMS, NEMS and Nanofabrication

Faculteit Science and Engineering
Jaar 2021/22
Vakcode WMIE010-05
Vaknaam MEMS, NEMS and Nanofabrication
Niveau(s) master
Voertaal Engels
Periode semester I b

Uitgebreide vaknaam MEMS, NEMS and Nanofabrication
Leerdoelen At the end of the course the students should:
1. Apply the fundamental principles of mechanics and materials to analyze and design MEMS/NEMS, including sensors and actuators.
2. Learn about basic micro- and nano- fabrication techniques and link the unit processing steps together to form a sensor/actuator technology.
3. Design MEMS/NEMS sensors and actuators that utilize various sensing mechanisms, such as, capacitive, electrostatic, thermal, piezoresistive, piezoelectric, magnetic, optical etc.
4. Be familiar with the tools and processes used in surface and bulk micromachining of microelectromechanical systems (MEMS).
5. Derive conceptual designs and describe the nanofabrication processes to realize MEMS/NEMS devices.
6. Develop insights into nanofabrication of state-of-art nanosensors with 2D materials and rapid prototyping.
7. Know how to practically use at least three methods for experimentally characterizing MEMS.
8. Report and present the MEMS design project to the student audience.
Omschrijving The course will introduce very large scale integration (VLSI) technology and the various MEMS unit processing steps (bulk and surface micromachining) involved in semiconductor and MEMS fabrication technologies. Various actuation and sensing techniques such as capacitive, thermal, electrostatic, magnetic, piezoresistive, piezoelectric and optical methods will be discussed. MEMS chip-scale packaging technologies such as flip-chip, ball grid array, multi-chip packaging to integrate the sensors into a system level will be discussed. Through case studies, the course will teach the students to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). The innovative use of soft polymers such as hydrogels, 2D materials, and rapid prototyping in the development of MEMS/NEMS devices for futuristic applications will be explored through student team projects.
Uren per week variabel
Onderwijsvorm Bijeenkomst (S), Hoorcollege (LC), Opdracht (ASM)
(Presence is mandatory at: 1) First lecture on Introduction to MEMS/NEMS and nanofabrication, 2) Tutorials, 3) MEMS unit processing lectures)
Toetsvorm Schriftelijk tentamen (WE), Tussentoets (IT), Verslag (R)
(Weight grades: WE 50%, IT 30%, R 20%. The students must be present and actively participate in all the modes of evaluation.)
Vaksoort master
Coördinator dr. A.G.P. Kottapalli
Docent(en) dr. A.G.P. Kottapalli
Entreevoorwaarden This course has a limited capacity.
- Students for which this is a *compulsory* course, can always enter the course.
Opmerkingen This course was previously registered with course code WMIE18007
Opgenomen in
Opleiding Jaar Periode Type
MSc Biomedical Engineering: Medical Device Design 2 semester I b verplicht
MSc Industrial Engineering and Management: Production Technology and Logistics  (Optional technical PTL modules) - semester I b ELective APE/SSCA
MSc Mechanical Engineering: Advanced Instrumentation  (Electives ) 1 semester I b keuzegroep
MSc Mechanical Engineering: Materials for Mechanical Engineering  (Electives ) 1 semester I b keuze
MSc Mechanical Engineering: Process Design for Energy Systems  (Electives ) 1 semester I b keuze
MSc Mechanical Engineering: Smart Factories  (Electives ) 1 semester I b keuze
MSc Nanoscience  (Optional Courses) - semester I b keuze