MEMS, NEMS and Nanofabrication

Uitgebreide vaknaam	MEMS, NEMS and Nanofabrication
Leerdoelen	At the end of the course the students should: 1. Apply the fundamental principles of mechanics and materials to analyze and design MEMS/NEMS, including sensors and actuators. 2. Learn about basic micro- and nano- fabrication techniques and link the unit processing steps together to form a sensor/actuator technology. 3. Design MEMS/NEMS sensors and actuators that utilize various sensing mechanisms, such as, capacitive, electrostatic, thermal, piezoresistive, piezoelectric, magnetic, optical etc. 4. Be familiar with the tools and processes used in surface and bulk micromachining of microelectromechanical systems (MEMS). 5. Derive conceptual designs and describe the nanofabrication processes to realize MEMS/NEMS devices. 6. Develop insights into nanofabrication of state-of-art nanosensors with 2D materials and rapid prototyping. 7. Know how to practically use at least three methods for experimentally characterizing MEMS. 8. Report and present the MEMS design project to the student audience.
Omschrijving	The course will introduce very large scale integration (VLSI) technology and the various MEMS unit processing steps (bulk and surface micromachining) involved in semiconductor and MEMS fabrication technologies. Various actuation and sensing techniques such as capacitive, thermal, electrostatic, magnetic, piezoresistive, piezoelectric and optical methods will be discussed. MEMS chip-scale packaging technologies such as flip-chip, ball grid array, multi-chip packaging to integrate the sensors into a system level will be discussed. Through case studies, the course will teach the students to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). The innovative use of soft polymers such as hydrogels, 2D materials, and rapid prototyping in the development of MEMS/NEMS devices for futuristic applications will be explored through student team projects.
Uren per week	variabel
Onderwijsvorm	Bijeenkomst (S), Hoorcollege (LC), Opdracht (ASM)
Toetsvorm	Opdracht (AST), Presentatie (P), Schriftelijk tentamen (WE), Tussentoets (IT), Verslag (R)
Vaksoort	master
Coördinator	dr. A.G.P. Kottapalli
Docent(en)	dr. A.G.P. Kottapalli
Entreevoorwaarden	This course has a limited capacity. - Students for which this is a *compulsory* course, can always enter the course.
Opmerkingen	This course was registered last year with course code WMIE18007
Opgenomen in	Opleiding Jaar Periode Type MSc Biomedical Engineering: CEMACUBE 1 semester I b verplicht MSc Biomedical Engineering: Medical Device Design 2 semester I b verplicht MSc Industrial Engineering and Management: Production Technology and Logistics  (Optional technical PTL modules) - semester I b ELective APE/SSCA MSc Mechanical Engineering: Advanced Instrumentation  (Electives ) 1 semester I b keuze MSc Mechanical Engineering: Materials for Mechanical Engineering  (Electives ) 1 semester I b keuze MSc Mechanical Engineering: Process Design for Energy Systems  (Electives ) 1 semester I b keuze MSc Mechanical Engineering: Smart Factories  (Electives ) 1 semester I b keuze MSc Nanoscience  (Optional Courses) - semester I b keuze